The turbomolecular pump is also a mechanical vacuum pump, which is pumped through the combination of high-speed rotating multi-stage turbine rotor blades and stationary blades, and produces a high compression ratio for the pumped gas in the molecular flow region, so as to obtain the required Vacuum performance. The ultimate vacuum of turbomolecular pump is higher than that of diffusion pump, up to 10-8pa. A certain degree of pre-stage vacuum is required for normal operation, and the degree of vacuum varies slightly depending on the pump, generally between 1-200Pa, and a mechanical pump can be used as the fore-stage pump.

　　The compound molecular pump is a series combination of a turbo molecular pump and a traction molecular pump. It integrates the advantages of the two types of pumps. It can have a large pumping speed and a high compression in a wide pressure range of 10-6-1Pa. ratio, which greatly increases the outlet pressure of the pump.

　　Molecular vacuum factory recommends regular inspections of molecular pumps, inspection of pump body temperature, noise, vibration, etc., timely detection of equipment failures, and timely contact with the manufacturer for molecular pumps that are approaching or reaching the maintenance cycle. For the faulty molecular pump, close the flapper valve or plug-in valve at the inlet of the molecular pump at the first time, and cut off the connection between the molecular pump and the vacuum chamber.

　　Molecular Vacuum Factory recommends observing the operating frequency of the molecular pump. When the display shows "0", turn off the power and disconnect the main cable. Cut off the connection between the front stage of the molecular pump and the pre-pumping pump, so that the entire molecular pump is isolated from the vacuum system.